Plasma-assisted MOCVD of titanium oxide and its composite coatings using metallo-organic precursors

Chemical Vapor Deposition

Volumn 13, Issue 12, 2007, Pages 691-697

  Arockiasamy, Sebastian ^a   Raghunathan, Vinjamoor Seshadri ^b   Premkumar, Peter Antony ^c   Kuppusami, Parasuraman ^d   Dasgupta, Arup ^d   Parameswaran, Padmanabhan ^d   Mallika, Chellanadar ^d   Nagaraja, Karachalacheruvu Seetharamaiah ^a  

^a LOYOLA COLLEGE   (India)

^b Non Ferrous Materials Technology Development Centre   (India)

^c BIELEFELD UNIVERSITY   (Germany)

^d INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

Author keywords

Composites; Microstructure; Nickel; Titania; Vapor pressure

Indexed keywords

AGGLOMERATION; CARBON FIBER REINFORCED PLASTICS; CHEMICAL ANALYSIS; CHEMICAL ELEMENTS; COMPOSITE COATINGS; COMPOSITE MATERIALS; DYES; ETHYLENE; HYDROSTATIC PRESSURE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSCOPIC EXAMINATION; NICKEL; NICKEL ALLOYS; NICKEL COMPOUNDS; ORGANIC COATINGS; OXYGEN; PHOTOELECTRON SPECTROSCOPY; PLASMAS; PRESSURE MEASUREMENT; SURFACE STRUCTURE; THERMOANALYSIS; TITANIUM; TITANIUM COMPOUNDS; TITANIUM DIOXIDE; TITANIUM OXIDES; VAPOR PRESSURE; VAPORS; X RAY ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL STATES; COMPOSITES; DEPOSITION PRESSURES; ENERGY DISPERSIVE; EQUILIBRIUM VAPOR PRESSURE MEASUREMENTS; FACE CENTERED CUBIC; GRAZING INCIDENCES; ORGANIC; ORGANIC PRECURSORS; PHASE IDENTIFICATIONS; PLASMA ENVIRONMENTS; STANDARD ENTHALPIES; SUBSTRATE TEMPERATURES; SURFACE MORPHOLOGY ANALYSIS; THERMAL ANALYSIS; TI PRECURSORS; TITANIA; X-RAY DIFFRACTIONS; X-RAY PHOTOELECTRON SPECTROSCOPIES;

COMPOSITE FILMS;

EID: 54949099634     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.200706627     Document Type: Article

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