Surface characterization of titanium oxide films synthesized by ion beam enhanced deposition

Thin Solid Films

Volumn 310, Issue 1-2, 1997, Pages 29-33

  Zhang, Feng ^a   Jin, S ^b   Mao, Yingjun ^a   Zheng, Zhihong ^a   Chen, Yu ^a   Liu, Xianghuai ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b IMEC   (Belgium)

Author keywords

Films; Ion beam enhanced deposition; Titanium oxide

Indexed keywords

ARGON; AUGER ELECTRON SPECTROSCOPY; ELECTRON BEAMS; FILM PREPARATION; ION BOMBARDMENT; OXIDATION; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); TITANIUM OXIDES; VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY; XENON;

CHEMICAL SHIFT;

BIOFILMS;

EID: 0031275201     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00338-6     Document Type: Article

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