A study on the development of CVD precursors V - Syntheses and characterization of new N-alkoxy-β-ketoiminate complexes of titanium

Journal of Organometallic Chemistry

Volumn 689, Issue 1, 2004, Pages 224-237

  Lim, Sunkwon ^a   Choi, Bohyun ^a   Min, Yo Sep ^b   Kim, Daesig ^b   Yoon, Il ^c   Lee, Shim Sung ^c   Lee, Ik Mo ^a  

^a Inha University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c Gyeongsang National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COORDINATION COMPOUND; DIMER; IMINE; KETONE DERIVATIVE; LIGAND; MONOMER; TITANIUM DERIVATIVE; TITANIUM DIOXIDE;

ANALYTIC METHOD; ARTICLE; CHEMICAL ANALYSIS; CHEMICAL REACTION; COMPLEX FORMATION; CONTROLLED STUDY; CRYSTAL STRUCTURE; DISSOCIATION; FILM; MOLECULAR MECHANICS; PRECURSOR; STRUCTURE ANALYSIS; SYNTHESIS; THERMOGRAVIMETRY; VAPOR; VOLATILIZATION;

EID: 0346723050     PISSN: 0022328X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jorganchem.2003.10.008     Document Type: Article

References (40)

1. Jones Jr. R.E. Zurcher P. Chu P. Taylor D.J. Lii Y.T. Jiang B. Maniar P.D. Gillespie S.J. Microelectron. Eng. 29 1995 3
2. Peng C.H. Desu S.B. J. Am. Ceram. Soc. 77 1994 1799
3. Cava R.F. Peck Jr. W.F. Krajewski J.J. Nature(London) 377 1995 215
4. Hwang C.S. Park S.O. Cho H.J. Kang C.S. Kang H.K. Lee S.I. Lee M.Y. Appl. Phys. Lett. 67 1995 2819
5. Min Y.S. Cho Y.J. Kim D.S. Lee J.H. Kim B.M. Lim S.K. Lee I.M. Lee W.I. Chem. Vap. Deposition 7 4 2001 146-149
6. Yeung K.S. Lam Y.W. Thin Solid Films 109 1983 169
7. Akhtar M.K. Pratsinis S.E. Mastrangelo S.V.R. J. Mater. Res. 9 1994 1241
8. Yokazawa M. Iwasa H. Teramoto I. Jpn. J. Appl. Phys. 7 1968 96
9. Takahashi Y. Tsuda K. Sugiyama K. Minoura H. Makino D. Tsuiki M. J. Chem. Soc., Faraday Trans. 77 1981 1051
10. Roedoer J.F. Vaartstra B.A. Van Buskirk P.C. Beratan H.R. Mater. Res. Soc. Symp. Proc. 415 1996 123
11. Beach D.B. Vallet C.E. Mater. Res. Soc. Symp. Proc. 415 1996 225
12. Jones A.C. Leedham T.J. Wright P.J. Crosbie M.J. Fleeting K.A. Otway D.J. O'Brien P. Pemble M.E. J. Mater. Chem. 8 8 1998 1773
13. Yamamuka M. Kawahara T. Tarutani M. Horikawa T. Oomori T. Ono K. J. Appl. Phys. 86 1999 1082
14. Shin H.K. Hampden-Smith M.J. Kodas T.T. Rheingold A.L. J. Chem. Soc., Chem. Commun. 217 1992
15. Gerfin T. Bechi M. Dahmen K.H. Mater. Sci. Eng. B17 1993 97
16. Bechi M. Galhts J. Huaziker M. Ataniny F. Dahmen K.H. J. Phys., Colloq. C5 1995 465
17. Schulz D.L. Hinds B.J. Stern C.L. Marks T.J. Inorg. Chem. 32 1993 249
18. Edwards D.A. Harker R.M. Mahon M.F. Molloy K.C. J. Mater. Chem. 9 1999 1171-1780
19. Zhang Y. Yuan Z. Puddephatt R.J. Chem. Mater. 10 1998 2293-2300
20. Tung Y.-L. Tseng W.-C. Lee C.-Y. Hsu P.-F. Chi Y. Peng S.-M. Lee G.-H. Organometallics 18 1999 864-869
21. Studebaker D.B. Neumayer D.A. Hinds B.J. Stern C.L. Marks T.J. Inorg. Chem. 39 2000 3148-3157
22. Lim S.K. Lee J.C. Sohn D.S. Lee W.I. Lee I.-M. Chem. Mater. 14 2002 1548-1554
23. Hong S.H. Lim S.K. Lee I.-M. Min Y.S. Kim D.S. Lee W.I. Thin Solid Films 409 2002 82-87
24. Min Y.S. Cho Y.J. Kim D.S. Lee J.H. Kim B.M. Lim S.K. Lee I.-M. Lee W.I. J. Phys., IV Fr., 11 2001 675-682
25. Edleman N.L. Wang A. Belot J.A. Metz A.W. Babcock J.R. Kawaoka A.M. Ni J. Metz M.V. Flaschenriem C.J. Stern C.L. Liable-Sands L.M. Rheingold A.L. Markworth P.R. Chang R.P.H. Chudzik M.P. Kannewurf C.R. Marks T.J. Inorg. Chem. 41 2002 5005-5023
26. Doherty S. Errington R.J. Housley N. Ridland J. Clegg W. Elsegood M.R.J. Organometallics 18 1999 1018
27. Errington R.J. Ridland W. Clegg R.A. Coxall J.M. Sherwood Polyhedron 17 1998 659-674
28. Holloway C.E. Sentek A.F. Can. J. Chem. 49 1951 519
29. Diamantis A.A. Manikas M. Salam M.A. Snow M.R. Tiekink E.R.T. Aust. J. Chem. 41 1988 453
30. Fleischer R. Wunderlich H. Braun M. Eur. J. Org. Chem. 1998 1063
31. Rao P.V. Rao C.P. Wegelius E.K. Kolemainen E. Rissanen K. J. Chem. Soc., Dalton Trans. 1999 4469
32. Flores-Lopez L.Z. Parra-Hake M. Somanathan R. Walsh P.J. Organometallics 19 2000 2153
33. Tanski J.M. Vaid T.P. Lobkovsky E.B. Wolczanski P.T. Inorg. Chem. 39 2000 4756
34. Tshuva E.Y. Goldberg I. Kol M. Goldschmidt Z. Inorg. Chem. 40 2001 4263
35. Caneschi A. Dei A. Gatteschi D. Chem. Commun. 1992 630
36. Hefele H. Ludwig E. Uhlemann E. Noth H.Z. Anorg. Allg. Chem. 621 1995 1431
37. Rahim M. Taylor N.J. Xin S. Collins S. Organometallics 17 1998 1315
38. Gibson V.C. J. Chem. Soc., Dalton Trans. 1994 1607
39. Bruker, smart and saint: Area Detector Control and Integration Software Ver. 5.0, Siemens Analytical X-ray Instruments, Madison, WI, 1998
40. Bruker, shelxtl: Structure Determination Programs Ver. 5.16, Bruker Analytical X-ray Instruments, Madison, WI, 1998