Effect of continuous in situ cathode polishing on plasma yield and energy in filtered pulsed arc discharge system

Diamond and Related Materials

Volumn 15, Issue 10, 2006, Pages 1677-1681

  Alakoski, Esa ^a   Tiainen, Veli Matti ^b   Kiuru, Mirjami ^b  

^a Institute of Clinical Medicine   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

Author keywords

Diamond like carbon; Plasma energy; Plasma yield; Pulsed arc discharge method

Indexed keywords

CHEMICAL POLISHING; DEPOSITION; DIAMOND LIKE CARBON FILMS; ELECTRIC DISCHARGES; IONS; PLASMA APPLICATIONS;

CATHODE MATERIAL; PLASMA ENERGY; PLASMA YIELD; PULSED ARC DISCHARGE METHOD;

CATHODES;

EID: 33748976903     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.02.002     Document Type: Article

References (22)

1. Anttila A., Lappalainen R., Heinonen H., Santavirta S., and Konttinen Y.T. New Diam. Front. Carbon Technol. 9 4 (1999) 283
2. Lappalainen R., Selenius M., Anttila A., Konttinen Y.T., and Santavirta S. J. Biomed. Mater. Res. Part B, Appl. Biomater. 66B (2003) 410
3. Anttila A., Salo J., and Lappalainen R. Mater. Lett. 24 (1995) 153
4. Salo J., Lappalainen R., and Anttila A. Appl. Phys., A 61 (1995) 353
5. Salo J. Nucl. Instrum. Methods, B 95 (1995) 119
6. Anttila A., Lappalainen R., Tiainen V.-M., and Hakovirta M. Adv. Mater. 9 15 (1997) 1161
7. Alakoski E., and Tiainen V.-M. Diamond Relat. Mater. 14 (2005) 1451
8. Alakoski E., Kiuru M., and Tiainen V.-M. Diamond Relat. Mater. 15 (2006) 34
9. Astrakhantsev N.V., Krasov V.I., and Paperny V.L. J. Phys., D 28 (1995) 2514
10. Gorbunov S.P., Krasov V.I., and Paperny V.L. J. Phys., D 30 (1997) 1922
11. Koskinen J., Anttila A., and Hirvonen J.-P. Surf. Coat. Technol. 47 (1991) 180
12. Hirvonen J.-P., Koskinen J., Torri P., Lappalainen R., and Anttila A. Nucl. Instrum. Methods, B 53 (1996) 118
13. Alakoski E., Kiuru M., Tiainen V.-M., and Anttila A. Diamond Relat. Mater. 12 (2003) 2115
14. Hakovirta M., Koponen I., Lappalainen R., and Anttila A. Diamond Relat. Mater. 7 (1998) 23
15. Artamonov M.F., Krasov V.I., and Paperny V.L. J. Phys., D 34 (1997) 3364
16. Artamonov M.F., Krasov V.I., and Paperny V.L. J. Exp. Theor. Phys. 93 6 (2001) 1216
17. Lappalainen R., Anttila A., and Heinonen H. Clin. Orthop. Relat. Res. 352 (1998) 118
18. McKenzie D.R. Rep. Prog. Phys. 59 (1996) 1611
19. Xu S., Flynn D., Tay B.K., Prawer S., Nugent K.W., Silva S.R.P., Lifshitz Y., and Milne W.I. Phila. Mag., B 76 (1997) 351
20. Chhowalla M., Robertson J., Chen C.W., Silva S.R.P., Davis C.A., Amaratunga G.A.J., and Milne W.I. J. Appl. Phys. 81 (1997) 139
21. Diaz J., Paolizelli G., Ferrer S., and Comin F. Phys. Rev., B 54 (1996) 8064
22. Merel P., Tabbal M., Chaker M., Moisa S., and Margot J. Appl. Surf. Sci. 136 (1998) 105