Protection of industrial sensors with ta-C

Vacuum

Volumn 67, Issue 3-4, 2002, Pages 599-604

  Tiainen, Veli Matti ^a,c   Lappalainen, Reijo ^b   Anttila, Asko ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

^b UNIVERSITY OF EASTERN FINLAND   (Finland)

^c Department of Physical Sciences ^*  (Finland)

Author keywords

Amorphous diamond; Filtered pulsed arc discharge deposition; Hard coatings; Industrial sensors; Tetrahedral amorphous carbon; Wear protection

Indexed keywords

AMORPHOUS MATERIALS; CARBON; ELECTRIC ARCS; EROSION; POROSITY; SENSORS; SINTERING; WEAR RESISTANCE;

INDUSTRIAL SENSORS;

PROTECTIVE COATINGS;

EID: 0037179786     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00265-8     Document Type: Conference Paper

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