Plasma-based ion implantation utilising a cathodic arc plasma

Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 136-142

  Bilek, M M M ^a   McKenzie, D R ^a   Tarrant, R N ^a   Lim, S H M ^b   McCulloch, D G ^b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b RMIT UNIVERSITY   (Australia)

Author keywords

Adhesion; Biomaterials; Cathodic arc; Ion implantation; Preferred orientation; Stress relaxation

Indexed keywords

BIOMATERIALS; NITROGEN; PLASMA APPLICATIONS; SURFACE TREATMENT; THIN FILMS; TITANIUM NITRIDE;

CATHODIC ARC PLASMAS; PLASMA-BASED ION IMPLANTATION (PBII);

ION IMPLANTATION;

PLASMA TREATMENT;

EID: 0036641641     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00078-6     Document Type: Article

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