Effect of a hard supra-thick interlayer on adhesion of DLC film prepared with PBIID process

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 706-709

  Utsumi, Takayuki ^a   Oka, Yoshihiro ^a   Fujiwara, Etsuo ^a   Yatsuzuka, Mitsuyasu ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Adhesion; Diamond like carbon (DLC); Multilayer film; Plasma sprayed WC; Plasma based ion implantation and deposition (PBIID); Scratch test; Supra thick interlayer

Indexed keywords

ADHESION; ALUMINUM ALLOYS; HYDROCARBONS; ION BEAM ASSISTED DEPOSITION; ION IMPLANTATION; SILICON CARBIDE;

MULTILAYER FILM; PLASMA SPRAYED WC; PLASMA-BASED ION IMPLANTATION AND DEPOSITION (PBIID); SCRATCH TEST; SUPRA-THICK INTERLAYER;

DIAMOND LIKE CARBON FILMS;

EID: 33947674888     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.01.127     Document Type: Article

References (17)

1. Taube K., Grischke M., and Bewilogua K. Surf. Coat. Technol. 68-69 (1994) 662
2. Bentzon M.D., Mogensen K., Hansen J.B., Barholm-Hansen C., Traeholt C., Holiday P., and Eskidsen S.S. Surf. Coat. Technol. 68-69 (1994) 651
3. Deng J., and Braun M. Diam. Rel. Mater. 4 (1995) 936
4. He X., Li W., and Li H. Mater. Sci. Eng. 31 (1995) 269
5. Lee K.R., Eun K.Y., Kim I., and Kim J. Thin Solid Films 1 (2000) 261
6. Walter K.C., Nastasi M., and Munson C. Surf. Coat. Technol. 93 (1997) 287
7. Shum P.W., Zhou Z.F., and Li K.Y. Surf. Coat. Technol. 166 (2003) 213
8. Kirinuki M., Tomita A., Kusuda M., Oka Y., Murakami A., and Yatsuzuka M. Mater. Sci. Forum 502 (2005) 315
9. Bilek M.M.M., McKenzie D.R., Tarrant R.N., Lim S.H.M., and McCloch D.G. Surf. Coat. Technol. 156 (2002) 136
10. Oka Y., Tao M., Nishimura Y., Azuma K., Fujiwara E., and Yatsuzuka M. Nucl. Instr. and Meth. B 206 (2003) 700
11. Oka Y., Kirinuki M., Nishimura Y., Azuma K., Fujiwara E., and Yatsuzuka M. Surf. Coat. Technol. 186 (2004) 1413
12. Nishimura Y., Oka Y., Azuma K., Fujiwara E., and Yatsuzuka M. J. High Temp. Soc. 29 (2003) 196 (in Japanese)
13. Yatsuzuka M., Oka Y., Tomita A., Murata N., and Hirota M. Solid State Phenom. 128 (2007) 245
14. Nishimura Y., Oka H., Akamatusu H., Azuma K., and Yatsuzuka M. Nucl. Instr. and Meth. B 206 (2003) 696
15. Oka Y., Nishijima M., Hiraga K., and Yasuzuka M. IEEE Trans. Plasma Sci. 34 (2006) 1183
16. Oka Y., Kirinuki M., Suzuki T., Yatsuzuka M., and Yatsui K. Nucl. Instr. and Meth. B 242 (2006) 335
17. M. Yatsuzuka, Y. Oka, Y. Nishimura, in: Proc. Inter'l Symp. on Pulsed Power and Plasma Applications, Chang-Won, Korea, 2004, OS4-5.