Ion beam analysis of diamond-like carbon films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 596-601

  Hirvonen, J P ^a,c   Koskinen, J ^a   Torri, P ^b   Lappalainen, R ^b   Anttila, A ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

^c JOINT RESEARCH CENTRE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHARACTERIZATION; COMPOSITION; HYDROGENATION; ION BEAMS; MECHANICAL PROPERTIES; MICROSTRUCTURE; NUCLEAR PHYSICS; OPTICAL PROPERTIES; RESONANCE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TRIBOLOGY;

DIAMOND LIKE CARBON FILMS; DOPPLER SHIFT ATTENUATION; HYDROGEN CONCENTRATION; ION BEAM ANALYSIS; NUCLEAR REACTION ANALYSIS;

AMORPHOUS FILMS;

EID: 0030565086     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01169-2     Document Type: Article

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