STEM observation of nano-interface between substrate and DLC film prepared by plasma-based ion implantation and deposition

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 257, Issue 1-2 SPEC. ISS., 2007, Pages 702-705

  Oka, Y ^a   Nishijima, M ^b   Hiraga, K ^b   Yatsuzuka, M ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

Adhesion strength; Diamond like carbon; EDS; HRTEM; Plasma based ion implantation and deposition; STEM

Indexed keywords

ALUMINUM ALLOYS; BOND STRENGTH (MATERIALS); DIAMOND LIKE CARBON FILMS; ION IMPLANTATION; NANOSTRUCTURED MATERIALS; PLASMA DEPOSITION; SUBSTRATES;

CRYSTAL STRUCTURE DAMAGED; HIGH-VOLTAGE PULSES; HYBRID PROCESSES; PLASMA-BASED ION IMPLANTATION AND DEPOSITION (PBIID);

INTERFACES (MATERIALS);

EID: 33947616377     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.02.083     Document Type: Article

References (11)

1. Franceschini D.F., Achete C.A., and Freire Jr. F.L. Appl. Phys. Lett. 60 (1992) 3229
2. McKenzie D.R., Muller M., and Pailthorpe B.A. Phys. Rev. Lett. 67 (1991) 773
3. Fallon P.J., Veerasamy V.S., Davis C.A., Robertson J., Amaratunga G.A.J., Milne W.I., and Koskinen J. Phys. Rev. B 48 (1993) 4777
4. Zon J.W., Schmidt K., Reichelt K., and Stritzker B. J. Vac. Sci. Technol. A 6 (1988) 3103
5. Bilek M.M.M., McKenzie D.R., Tarrant R.N., Lim S.H.M., and McClloch D.G. Surf. Coat. Technol. 156 (2002) 136
6. Bilek M.M.M., Tarrant R.N., McKenzie D.R., Lim S.H.N., and McClloch D.G. IEEE Trans. Plasma Sci. 31 (2003) 939
7. Oka Y., Tao M., Nishimura Y., Azuma K., and Yatsuzuka M. Nucl. Instr. and Meth. B 206 (2003) 700
8. Oka Y., Kirinuki M., Nishimura Y., Azuma K., Fujiwara E., and Yatsuzuka M. Surf. Coat. Technol. 186 (2004) 141
9. Walter K.C., Nastasi M., and Munson C. Surf. Coat. Technol. 93 (1997) 287
10. M. Yatsuzuka, Y. Oka, Y. Nishimura, in: Proceedings of the International Symposium on Pulsed Power and Plasma Applications, Chang-Won, Korea, 2004, p. 97.
11. Oka Y., Nishijima M., Hiraga K., and Yatsuzuka M. IEEE Trans. Plasma Sci. 34 4 (2006) 1183 (Special issue)