Phase-change materials in optically triggered microactuators

Journal of Microelectromechanical Systems

Volumn 17, Issue 5, 2008, Pages 1094-1103

  Kalb, Johannes A ^a   Guo, Qiang ^b   Zhang, Xiaoqiang ^b   Li, Yi ^b   Sow, Chornghaur ^b   Thompson, Carl V ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Actuators; Laser annealing; Stress measurement; Tellurium alloys

Indexed keywords

ACTUATORS; COMPACT DISKS; COMPUTER GRAPHICS; DATA STORAGE EQUIPMENT; DISKS (MACHINE COMPONENTS); DISKS (STRUCTURAL COMPONENTS); ELASTICITY; FLASH MEMORY; INTERMETALLICS; MICROACTUATORS; MULTIMEDIA SYSTEMS; OPTICAL DATA PROCESSING; OPTICAL DATA STORAGE; PHASE TRANSITIONS; RANDOM ACCESS STORAGE; STRUCTURAL DESIGN; THICK FILMS;

ANALYTICAL MODELLING; CANTILEVER DEFLECTION; DENSITY CHANGES; DEVICE DIMENSIONS; DIGITAL VIDEO; FILM STRESSES; LASER ANNEALING; LASER-INDUCED; MATERIAL SELECTIONS; OPTICAL DATA; PHASE CHANGES; PHASE TRANSFORMATIONS; QUANTITATIVE CRITERIA; RANDOM ACCESS MEMORIES; REWRITABLE; STRESS MEASUREMENT; TELLURIUM ALLOYS;

PHASE CHANGE MATERIALS;

EID: 53649095182     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.928708     Document Type: Article

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