Measurement of micromechanical properties of polysilicon microstructures with an atomic force microscope

Sensors and Actuators, A: Physical

Volumn 67, Issue 1-3, 1998, Pages 215-219

  Serre, C ^a   Gorostiza, P ^a   Perez Rodriguez A ^a   Sanz, F ^a   Morante, J R ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Atomic force microscopes; Mechanical properties; Micromechanical devices; Polysilicon; Thin films; Young's modulus

Indexed keywords

ELASTIC MODULI; MECHANICAL PROPERTIES; SILICON;

POLYSILICON;

ATOMIC FORCE MICROSCOPY;

EID: 0042284293     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00031-4     Document Type: Article

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