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Journal of Applied Physics

Volumn 104, Issue 5, 2008, Pages

Simulation and laser vibrometry characterization of piezoelectric AlN thin films

(6) Hernando, J a Sanchez Rojas J L a Gonzalez Castilla S b Iborra, E b Ababneh, A c Schmid, U c

a UNIVERSITY OF CASTILLA LA MANCHA (Spain)

b UNIVERSIDAD POLITÉCNICA DE MADRID (Spain)

c SAARLAND UNIVERSITY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM COMPOUNDS; DEFORMATION; ELECTRIC FIELDS; ELECTROCHEMICAL ELECTRODES; ELECTROMAGNETIC FIELD THEORY; ELECTROMAGNETIC FIELDS; GEODETIC SATELLITES; INTERFEROMETRY; LASERS; LIGHT METALS; LITHOGRAPHY; METALLIZING; NITRIDES; NONMETALS; NUMERICAL ANALYSIS; PIEZOELECTRICITY; SCANNING; SILICON; SPUTTERING; THICK FILMS; THIN FILMS; VAPOR DEPOSITION;

ALN THIN FILMS; BOTTOM SURFACES; DISPLACEMENT PROFILES; DOUBLE-BEAM; FIELD INDUCED; FINITE-ELEMENT METHODS; INTERFEROMETRIC CONFIGURATION; LASER SCANNING VIBROMETRY; LASER VIBROMETRY; NUMERICAL CALCULATIONS; PIEZOELECTRIC ALUMINUM NITRIDE THIN FILMS; PIEZOELECTRIC COEFFICIENTS; QUANTITATIVE INFORMATION; SCANNING LASERS; SILICON SUBSTRATES; TOP SURFACE; VERTICAL RESOLUTIONS;

FINITE ELEMENT METHOD;

EID: 51849095871 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2957081 Document Type: Article

Times cited : (44)

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