Measurement of longitudinal piezoelectric coefficient of thin films by a laser-scanning vibrometer

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 50, Issue 2, 2003, Pages 113-116

  Yao, Kui ^a   Tay, Francis Eng Hock ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DOPPLER EFFECT; ELECTRIC FIELD MEASUREMENT; FERROELECTRIC THIN FILMS; INTERFEROMETERS; LASER APPLICATIONS; LEAD COMPOUNDS; SOL-GELS; SUBSTRATES; VIBRATION MEASUREMENT;

LASER SCANNING VIBROMETER; LEAD ZIRCONIUM TITANATE; MACH-ZEHNDER INTERFEROMETER; PIEZOELECTRIC COEFFICIENT;

PIEZOELECTRICITY;

BIOMATERIAL; LEAD; LEAD TITANATE ZIRCONATE; TITANIUM; ZIRCONIUM;

ACOUSTICS; CHEMISTRY; CRYSTALLOGRAPHY; EQUIPMENT DESIGN; EVALUATION; INSTRUMENTATION; INTERFEROMETRY; LASER; LETTER; MATERIALS TESTING; METHODOLOGY; SENSITIVITY AND SPECIFICITY; TRANSDUCER; VIBRATION;

ACOUSTICS; COATED MATERIALS, BIOCOMPATIBLE; CRYSTALLOGRAPHY; EQUIPMENT DESIGN; INTERFEROMETRY; LASERS; LEAD; MATERIALS TESTING; SENSITIVITY AND SPECIFICITY; TITANIUM; TRANSDUCERS; VIBRATION; ZIRCONIUM;

EID: 0037289708     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2003.1182115     Document Type: Letter

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