Influence of test capacitor features on piezoelectric and dielectric measurement of ferroelectric films

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 1, 2006, Pages 15-22

  Wang, Zhihong ^a   Lau, Gih Keong ^b   Zhu, Weiguang ^a   Chao, Chen ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DEFORMATION; PIEZOELECTRIC DEVICES; SUBSTRATES;

DIELECTRIC MEASUREMENTS; FERROELECTRIC FILMS; TEST CAPACITORS;

FERROELECTRIC MATERIALS;

EID: 33144479517     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.1588386     Document Type: Article

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