A novel piezoelectric-based RF BAW filter

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 779-784

  Cong, Peng ^a   Ren, Tian Ling ^a   Liu, Li Tian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

BAW; Filter; Resonator; Surface micromachining

Indexed keywords

BANDPASS FILTERS; MICROMACHINING; PIEZOELECTRICITY; RESONATORS; WAVE EQUATIONS;

SURFACE MICROMACHINING;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0037391763     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00999-1     Document Type: Conference Paper

References (6)

1. Naik Rajan S., Lutsky J.J., Reif R., et al. Measurements of the bulk, C-axis electromechanical coupling constant as a function of AlN film quality. IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 47:(1):2000;292-296.
2. Naik Rajan S., Lutsky J.J., Reif R., et al. Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator. IEEE Trans. Ultrason. Ferroelectr. Freq. Control. 45:(1):1998;257-263.
3. Gregory T.A.K., Nadim I.M., Kurt E.P. Bulk micromachining of silicon. Proc. IEEE [C]. 86:(8):1998;1536-1551.
4. James M.B., Roger T.H., Richard S.M., et al. Surface micromachining for microelectromechanical systems. Proc. IEEE [C]. 86:(8):1998;1552-1574.
5. Kronast W., Mueller B., Siedel W., et al. Single-chip condenser microphone using porous silicon as sacrificial layer for the air gap. Sensors Actuators A: Physical. 87:(3):2001;188-193.
6. Bell T.E., Gennissen P.T.J., DeMunter D., et al. Porous silicon as a sacrificial material. J. Micromech. Microeng. 6:(4):1996;361-369.