Circuital model for the analysis of the piezoelectric response of AIN films using SAW filters

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 11, 2007, Pages 2367-2375

  Iborra, Enrique ^a   Vergara, Lucía ^a   Sangrador, Jesús ^a   Clement, Marta ^a   Sanz Hervás, Alfredo ^a   Olivares, Jimena ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL COUPLING; PIEZOELECTRIC MATERIALS; THIN FILMS;

CONDUCTIVE SUBSTRATE; DIFFERENT CIRCUITAL ELEMENTS; PARASITIC EFFECTS; PIEZOELECTRIC THIN FILM;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 37048999330     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.541     Document Type: Article

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