Agglomeration and uniform growth of Si3 N4 on Si(100): Experiments and first-principles calculations

Physical Review B - Condensed Matter and Materials Physics

Volumn 78, Issue 8, 2008, Pages

  Kato, Koichi ^a   Matsushita, Daisuke ^a   Muraoka, Koichi ^a   Nakasaki, Yasushi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 50849112436     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.78.085321     Document Type: Article

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