Synthesis of cubic silicon nitride

Nature

Volumn 400, Issue 6742, 1999, Pages 340-342

  Zerr, Andreas ^a   Miehe, Gerhard ^a   Serghiou, George ^b   Schwarz, Marcus ^a   Kroke, Edwin ^a   Riedel, Ralf ^a   Fueß, Hartmut ^a   Kroll, Peter ^c   Boehler, Reinhard ^b  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b MAX PLANCK INSTITUTE FOR CHEMISTRY   (Germany)

^c Chemistry Department   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; FRACTURE TOUGHNESS; HARDNESS; INSULATING MATERIALS; MASKS; PASSIVATION; PRESSURE EFFECTS; SYNTHESIS (CHEMICAL); WEAR RESISTANCE;

CUBIC SILICON NITRIDE;

SILICON NITRIDE;

SILICON DERIVATIVE; SILICON NITRIDE; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL ANALYSIS; COMPRESSIVE STRENGTH; HARDNESS; MATHEMATICAL COMPUTING; PHYSICAL TOLERANCE; PRIORITY JOURNAL; REACTION ANALYSIS; SYNTHESIS; TECHNOLOGY;

EID: 0033595185     PISSN: 00280836     EISSN: None     Source Type: Journal    
DOI: 10.1038/22493     Document Type: Article

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