Oxidation of the Si(001) surface: Lateral growth and formation of P60 centers

Physical Review Letters

Volumn 91, Issue 14, 2003, Pages

  Yamasaki, Takahiro ^a   Kato, Koichi ^b   Uda, Tsuyoshi ^c  

^a FUJITSU LABORATORIES LTD   (Japan)

^b TOSHIBA CORPORATION   (Japan)

^c HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ALGORITHMS; ATOMS; CALCULATIONS; CHEMICAL BONDS; MOLECULAR DYNAMICS; MONOLAYERS; OXIDATION; OXYGEN; PROBABILITY DENSITY FUNCTION; SURFACES;

DENSITY FUNCTIONAL THEORY; FIRST PRINCIPLE CALCULATIONS; TRIMERS;

SEMICONDUCTING SILICON;

EID: 0242581725     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (24)

1. H. Watanabe, K. Kato, T. Uda, K. Fujita, M. Ichikawa, T. Kawamura, and K. Terakura, Phys. Rev. Lett. 80, 345 (1998).
2. A. Stesmans and V. V. Afanas'ev, J. Appl. Phys. 83, 2449 (1998).
3. T. Umeda, M. Nishizawa, T. Yasuda, J. Isoya, S. Yamasaki, and K. Tanaka, Phys. Rev. Lett. 86, 1054 (2001).
4. S. Mizuo and H. Higuchi, Jpn. J. Appl. Phys. 20, 739 (1981).
5. T. Uchiyama, T. Uda, and K. Terakura, Surf. Sci. 433-435, 896 (1999).
6. K. Kato, T. Uda, and K. Terakura, Phys. Rev. Lett. 80, 2000 (1998)
7. K. Kato and T. Uda, Phys. Rev. B 62, 15978 (2000).
8. A. Pasquarello, M. S. Hybersten, and R. Car, Nature (London) 396, 58 (1998).
9. A. Stirling, A. Pasquarello, J.-C. Charlier, and R. Car, Phys. Rev. Lett. 85, 2773 (2000).
10. H. Kageshima and K. Shiraishi, Appl. Surf. Sci. 130-132, 176 (1998)
11. Phys. Rev. Lett. 81, 5936 (1998)
12. Surf. Sci. 438, 102 (1999).
13. D. Vanderbilt, Phys. Rev. B 41, 7892 (1990).
14. J. P. Perdew, in Proceedings of Electronic Structure of Solids '91, edited by P. Ziesche and H. Eschrig (Academie Verlag, Berlin, 1991), p. 11.
15. M. Boero, A. Pasquarello, J. Sarnthein, and R. Car, Phys. Rev. Lett. 78, 887 (1997).
16. G. Brocks and P.J. Kelly, Phys. Rev. Lett. 76, 2362 (1996).
17. K. O. Ng and D. Vanderbilt, Phys. Rev. B 59, 10132 (1999).
18. R. Buczko, S. J. Pennycook, and S. T. Pantelides, Phys. Rev. Lett. 84, 943 (2000).
19. T. Yamasaki, C. Kaneta, T. Uchiyama, T. Uda, and K. Terakura, Phys. Rev. B 63, 115314 (2001).
20. Y. Tu and J. Tersoff, Phys. Rev. Lett. 84, 4393 (2000)
21. 89, 086102 (2002).
22. b centers is estimated to be 4 nm and the nearest distance is around 2 nm [S. Yamasaki and W. Futako (private communication)].
23. Y. Shibata, K. Taniguchi, and C. Hamaguchi, J. Appl. Phys. 70, 4846 (1991).
24. M. Uematsu, H. Kageshima, and K. Shiraishi, Jpn. J. Appl. Phys. 39, L699 (2000).