Kelvin probe microscopy for reliability investigation of RF-MEMS capacitive switches

Microelectronics Reliability

Volumn 48, Issue 8-9, 2008, Pages 1232-1236

  Belarni, A ^a   Lamhamdi, M ^a   Pons, P ^a   Boudou, L ^a   Guastavino, J ^a   Segui, Y ^a   Papaioannou, G ^a,b   Plana, R ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

^b UNIVERSITY OF ATHENS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE INJECTION; COMPOSITE MICROMECHANICS; ELECTRIC SWITCHES; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; SURFACE CHARGE; SURFACES;

BIAS-VOLTAGE; CAPACITIVE SWITCHING; DYNAMIC CHARGES; FABRICATION PROCESSES; INJECTION TIME; INTER-LAYER DIELECTRIC MATERIALS; KELVIN FORCE MICROSCOPY; KELVIN PROBE MICROSCOPY; NANOMETRIC SCALES; RF-MEMS; RF-MEMS SWITCHES; SURFACE CONDUCTION;

DIELECTRIC MATERIALS;

EID: 50549102993     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2008.07.046     Document Type: Article

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