Dielectric charging in radio frequency microelectromechanical system capacitive switches: A study of material properties and device performance

Applied Physics Letters

Volumn 90, Issue 23, 2007, Pages

  Papaioannou, G ^a,b   Papapolymerou, J ^b   Pons, P ^c   Plana, R ^c  

^a UNIVERSITY OF ATHENS   (Greece)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DEPOLARIZATION; ELECTRIC SPACE CHARGE; MEMS; MIM DEVICES; THERMAL EFFECTS;

CAPACITIVE SWITCHES; DEPOLARIZATION CURRENT METHOD; DIELECTRIC CHARGING; DIELECTRIC POLARIZATION;

ELECTRIC SWITCHES;

EID: 34250703152     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2746056     Document Type: Article

References (13)

1. C. L. Goldsmith, J. Ehmke, A. Malczewski, B. Pillans, S. Eshelman, Z. Yao, J. Brank, and M. Eberly, IEEE MTT-S Int. Microwave Symp. Dig. 1, 227 (2001).
2. J. Wibbeler, G. Pfeifer, and M. Hietschold, Sens. Actuators, A 71, 74 (1998).
3. G. M. Rebeiz, RF MEMS Theory, Design and Technology (Wiley, Hoboken, NJ, 2003), Chap., p. 189.
4. X. Rottenberg, B. Nauwelaers, W. De Raedt, and H. A. C. Tilmans, 12th GAAS Symposium, Amsterdam, 2004 Vol. 1, p. 77.
5. S. Melle, D. De Conto, L. Mazenq, D. Dubuc, B. Poussard, C. Bordas, K. Grenier, L. Bary, O. Vendier, J. L. Muraro, J. L. Cazaux, and R. Plana, Microelectron. Reliab. 45, 1770 (2005).
6. X. Yuan, Z. Peng, J. C. M. Hwang, D. Forehand, and C. L. Goldsmith, IEEE MTT-S Int. Microwave Symp. Dig. 1, 47 (2006).
7. M. Lamhamdi, J. Guastavino, L. Boudou, Y. Segui, P. Pons, L. Bouscayrol, and R. Plana, Microelectron. Reliab. 46, 1700 (2006).
8. G. J. Papaioannou, M. Exarchos, V. Theonas, G. Wang, and J. Papapolymerou, IEEE Trans. Microwave Theory Tech. MTT-53, 3467 (2005).
9. G. J. Papaioannou, M. Exarchos, V. Theonas, J. Psychias, G. Konstantinidis, D. Vasilache, A. Muller, and D. Neculoiu, Appl. Phys. Lett. 89, 103512 (2006).
10. M. Exarchos, V. Theonas, P. Pons, G. J. Papaioannou, S. Melle, D. Dubuc, F. Cocetti, and R. Plana, Microelectron. Reliab. 45, 1782 (2005).
11. M. Exarchos, E. Papandreou, P. Pons, M. Lamhamdi, G. J. Papaioannou, and R. Plana, Microelectron. Reliab. 46, 1695 (2006).
12. J. Vandershueren and J. Casiot, in Thermally Stimulated Relaxation in Solids, Topics in Applied Physics Vol. 37, edited by, P. Braunlich, (Springer-Verlag, Berlin, 1979), Chap., p. 174.
13. W. Merlijn van Spengen, R. Puers, R. Mertens, and I. de Wolf, J. Micromech. Microeng. 14, 514 (2004).