Failure predictive model of capacitive RF-MEMS

Microelectronics Reliability

Volumn 45, Issue 9-11, 2005, Pages 1770-1775

  Melle S ^a   De Conto, D ^a   Mazenq, L ^a   Dubuc, D ^a   Poussard, B ^a   Bordas, C ^a   Grenier, K ^a   Bary, L ^a   Vendier, O ^b   Muraro, J L ^b   Cazaux, J L ^b   Plana, R ^a  

^a LAAS CNRS   (France)

^b THALES ALENIA SPACE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; DIELECTRIC DEVICES; FAILURE (MECHANICAL); KINETIC THEORY; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MONITORING; NATURAL FREQUENCIES; OPTIMIZATION; RELIABILITY; STRESSES;

DIELECTRIC CHARGING; ELECTRICAL STRESSES; FAILURE MECHANISMS; FAILURE PREDICTIVE MODELS;

FAILURE ANALYSIS;

EID: 24144435419     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2005.07.092     Document Type: Conference Paper

References (10)

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10. Mercier D, Van Caekenberghe K, Rebeiz GM. Miniature RF MEMS Switched Capacitors. IMS-MTT 2005, Long Beach USA, June 2005.