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Diamond and Related Materials

Volumn 15, Issue 4-8, 2006, Pages 1122-1125

Function of aluminum coating on fabrication of nanowhiskers by radio frequency plasma etching

(2) Li, C Y a,b Hatta, A a

a KOCHI UNIVERSITY OF TECHNOLOGY (Japan)

b HARBIN ENGINEERING UNIVERSITY (China)

Author keywords

Al coating; Anisotropic etching; Diamond nanowhiskers; RF plasma

Indexed keywords

ALUMINUM; ANISOTROPY; COATINGS; CRYSTAL WHISKERS; NANOSTRUCTURED MATERIALS; PLASMA ETCHING;

AL COATING; ANISOTROPIC ETCHING; DIAMOND NANOWHISKERS; RF PLASMA;

DIAMOND FILMS;

EID: 33745258159 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2005.12.024 Document Type: Article

Times cited : (1)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.