A high resolution water soluble fullerene molecular resist for electron beam lithography

Nanotechnology

Volumn 19, Issue 27, 2008, Pages

  Chen, X ^a   Palmer, R E ^a   Robinson, A P G ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ELECTRON GUNS; ELECTRONICS INDUSTRY; FULLERENES; MICROELECTRONICS; NANOSTRUCTURES; PARTICLE BEAMS; SOLVENTS;

ENVIRONMENTALLY-FRIENDLY; HIGH RESOLUTIONS; NANOMETRE; NEGATIVE TONES; RESIST FILMS; WATER SOLUBLE FULLERENE;

ELECTRON BEAM LITHOGRAPHY;

FULLERENE; WATER;

ARTICLE; ELECTRON BEAM; ELECTRON BEAM TOMOGRAPHY; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPE; SEMICONDUCTOR;

EID: 48249092065     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/27/275308     Document Type: Article

References (24)

1. Palmer R E and Leung C 2007 Trends Biotechnol. 25 48
2. Yang L, Motohisa J, Takeda J, Tomioka K and Fukui T 2007 Nanotechnology 18 105302
3. Jayasekera T and Mintmire J W 2007 Nanotechnology 18 424033
4. International Technology Roadmap for Semiconductors 2006 (Update http://www.itrs.net.)
5. Brainard R L, Barclay G G, Anderson E H and Ocola L E 2002 Microelectron. Eng. 61/62 707
6. Ishida M, Fujita J I, Ogura T, Ochiai Y, Ohshima E and Momoda J 2003 Japan. J. Appl. Phys. 1 42 3913
7. Kadota T, Kageyama H, Wakaya F, Gamo K and Shirota Y 2004 Chem. Lett. 33 706
8. Zaid H M, Robinson A P G, Palmer R E, Manickam M and Preece J A 2007 Adv. Funct. Mater. 17 2522
9. Kretz J, Dreeskornfeld L, Ilicali G, Lutz T and Weber W 2005 Microelectron. Eng. 78/79 479
10. Robinson A P G, Palmer R E, Tada T, Kanayama T and Preece J A 1998 Appl. Phys. Lett. 72 1302
11. Robinson A P G, Palmer R E, Tada T, Kanayama T, Preece J A, Philp D, Jonas U and Deiderich F 1998 Chem. Phys. Lett. 289 586
12. Robinson A P G, Palmer R E, Tada T, Kanayama T, Shelley E J, Philp D and Preece J A 1999 Chem. Phys. Lett. 312 469
13. Gibbons F P, Robinson A P G, Palmer R E, Manickam M and Preece J A 2006 Small 2 1003
14. Robinson A P G, Gibbons F P, Zaid H M, Manickam M, Preece J A and Palmer R E 2007 Small 3 2076
15. Chen X, Robinson A P G, Manickam M and Preece J A 2007 Microelectron. Eng. 84 1066
16. Havard J M, Yoshida M, Pasini D, Vladimirov N, Fréchet J M J, Medeiros D R, Patterson K, Yamada S, Willson C G and Byers J D 1999 J. Polym. Sci. Pol. Chem. 37 1225
17. Havard J M, Shim S Y, Fréchet J M J, Lin Q, Medeiros D R, Willson C G and Byers J D 1999 Chem. Mater. 11 719
18. Loh M M, Levy J I, Spengler J D, Houseman E A and Bennett D H 2007 Environ. Health. Perspect. 115 1160
19. Taylor L D, Kolesinski H S, Edwards B, Haubs M and Ringsdorf H 1988 J. Polym. Sci. Polym. Lett. 26 177
20. Lin Q, Steinhäusler T, Simpson L, Wilder M, Medeiros D R, Willson C G, Havard J M and Fréchet J M J 1997 Chem. Mater. 9 1725
21. Zhang C, Vekselman A M and Darling G D 1995 Chem. Mater. 7 850
22. Navarro-Lupion F-J, Bustamante P and Escalera B 2005 J. Pharm. Sci. 94 1608
23. Constantoudis V, Patsis G P, Leunissen L H A and Gogolides E 2004 J. Vac. Sci. Technol. B 22 1974
24. Zaid H M, Manickam M, Preece J A, Palmer R E and Robinson A P G 2008 Microelectron. Eng. at press doi:10.1016/j.mee.2008.02.009