Design of photoresists with reduced environmental impact. II. water-soluble resists based on photocrosslinking of poly(2-lsopropenyl-2-oxazoline)

Journal of Polymer Science, Part A: Polymer Chemistry

Volumn 37, Issue 9, 1999, Pages 1225-1236

  Havard, J M ^a   Yoshida, M ^b   Pasini, D ^c   Vladimirov, N ^a   Frechet, J M J ^b   Medeiros, D R ^c   Patterson, K ^a   Yamada, S ^b   Willson, C G ^c   Byers, J D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of Texas at Austin   (United States)

^c SEMATECH   (United States)

Author keywords

Chemical amplification; Environmental enhancement; Melamine; Photoacid generator; Photocrosslinking; Photoresist; Polyoxazoline

Indexed keywords

AMINES; AROMATIC POLYMERS; CHEMICAL MODIFICATION; COPOLYMERS; CROSSLINKING; HYDROLYSIS; IMAGE QUALITY; MOLECULAR STRUCTURE; PHOTOCHEMICAL REACTIONS; POLYSTYRENES;

CHEMICAL AMPLIFICATION; MELAMINE; PHOTOACID GENERATOR; PHOTOCROSSLINKING; POLYISOPROPENYL OXAZOLINE;

PHOTORESISTS;

EID: 0032632492     PISSN: 0887624X     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1099-0518(19990501)37:9<1225::AID-POLA2>3.0.CO;2-5     Document Type: Article

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