Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication

Journal of Micromechanics and Microengineering

Volumn 18, Issue 7, 2008, Pages

  Lopez, M J ^a   Caballero, D ^b   Campo, E M ^a,b   Perez Castillejos, R ^a   Errachid, A ^b   Esteve, J ^a   Plaza, J A ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIZERS; BEAM PLASMA INTERACTIONS; CHEMOTHERAPY; DRUG DELIVERY; DRUG DOSAGE; FABRICATION; GOLD; ION BEAMS; ION BOMBARDMENT; IONS; MICROANALYSIS; MICROFABRICATION; MICROMACHINING; MILLING (MACHINING); NOZZLES; OPTICAL DESIGN; POLYSILICON; SELF ASSEMBLED MONOLAYERS; TECHNOLOGY;

BIOLOGICAL APPLICATIONS; ENCLOSED MICROCHANNELS; FABRICATION PROCESSES; FUNCTIONALIZATION; GOLD SURFACES; INLET PORTS; ION BEAM MILLING (IBM); MICRO DISPENSER; MICRO-PIPETTE; MICROFABRICATION TECHNOLOGIES; SELF ASSEMBLED MONOLAYERS (SAMS);

DISPENSERS;

EID: 47249146078     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/7/075021     Document Type: Article

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