Collective fabrication of an in-plane silicon nanotip for parallel femtoliter droplet deposition

Journal of Micromechanics and Microengineering

Volumn 17, Issue 1, 2007, Pages

  Saya, D ^a   Leichle T ^a   Pourciel, J B ^a   Bergaud, C ^a   Nicu, L ^a  

^a LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; LITHOGRAPHY; MASKS; MICROCHANNELS; SUBSTRATES; WETTING;

FEMTOLITER DROPLETS; MICROCANTILEVERS; SURFACE WETTABILITY;

MICROFLUIDICS;

EID: 33947602854     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/1/N01     Document Type: Article

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