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Volumn 2, Issue 3, 2007, Pages 328-334

Novel fabrication method for long silicon microneedles with three-dimensional sharp tips and complicated shank shapes by isotropic dry etching

Author keywords

Isotropic dry etching; Penetration experiment; Silicon microneedle; Three dimensional shank shape; Three dimensional sharp tip

Indexed keywords

DRY ETCHING; NEEDLES; SUBSTRATES;

EID: 34248157248     PISSN: 19314973     EISSN: 19314981     Source Type: Journal    
DOI: 10.1002/tee.20147     Document Type: Article
Times cited : (26)

References (16)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.