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Journal of the Electrochemical Society

Volumn 149, Issue 1, 2002, Pages

Water dispersible silanes for wettability modification of polysilicon

(5) Almanza Workman, A Marcia a Raghavan, Srini a Deymier, Pierre a Monk, David J b Roop, Ray b

a University of Arizona (United States)

b MOTOROLA INC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MODIFICATION; CURING; HYDROPHOBICITY; PH EFFECTS; SILANES; SUBSTRATES; SURFACE ACTIVE AGENTS; WETTING;

MICROELECTROMECHANICAL STRUCTURE DEVICES;

POLYSILICON;

EID: 0036225574 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1423645 Document Type: Article

Times cited : (24)

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