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Volumn 109, Issue 1, 2005, Pages 135-140

Fabrication of silicon oxide microneedles from macroporous silicon

Author keywords

Electrochemical etching; Macroporous silicon; Microneedles; Microsyringes

Indexed keywords

ANTIBODIES; DNA; ELECTROCHEMISTRY; ETCHING; HYDROFLUORIC ACID; POROUS MATERIALS; SILICA; SILICON;

EID: 22944448057     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.03.015     Document Type: Article
Times cited : (59)

References (12)
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    • A model system for photonic crystals: Macroporous silicon
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    • Macroporous silicon based capacitive affinity sensor-fabrication and electrochemical studies
    • C.A. Betty, R. Lal, D.K. Sharma, J.V. Yakhmi, and J.P. Mittal Macroporous silicon based capacitive affinity sensor-fabrication and electrochemical studies Sens. Actuators B: Chem. 97 2004 334 343
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    • Betty, C.A.1    Lal, R.2    Sharma, D.K.3    Yakhmi, J.V.4    Mittal, J.P.5
  • 6
    • 0038602881 scopus 로고    scopus 로고
    • Asymmetric pores in a silicon membrane acting as massively parallel Brownian ratchets
    • S. Matthias, and F. Müller Asymmetric pores in a silicon membrane acting as massively parallel Brownian ratchets Nature 424 2003 53 57
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    • Matthias, S.1    Müller, F.2
  • 7
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    • Electrochemical etching in HF solutions for silicon micromachining
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    • Lehmann, V.1
  • 10
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    • The physics of macropore formation in low doped n-type silicon
    • V. Lehmann The physics of macropore formation in low doped n-type silicon J. Electrochem. Soc. 140 1993 2836 2843
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    • Lehmann, V.1
  • 12
    • 0031121457 scopus 로고    scopus 로고
    • The limits of macropore array fabrication
    • V. Lehmann, and U. Grüning The limits of macropore array fabrication Thin Solid Films 297 1997 13 17
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.