The deformation of microcantilever-based infrared detectors during thermal cycling

Journal of Micromechanics and Microengineering

Volumn 18, Issue 7, 2008, Pages

  Lin, I Kuan ^a   Zhang, Yanhang ^a   Zhang, Xin ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; DEFORMATION; INFRARED DETECTORS;

BI MATERIALS; CURVATURE (SORI); INFRA RED (IR) DETECTORS; INFRARED (IR); IR DETECTORS; LOW COSTS; LOW NOISE; MICRO CANTILEVERS; RELIABILITY REQUIREMENTS; RESIDUAL STRAINS; UNCOOLED; WIDER RANGE;

DETECTORS;

EID: 47249101658     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/7/075012     Document Type: Article

References (33)

1. Rogalski A 2003 Infrared detectors: status and trends Prog. Quantum Electron. 27 59-210
2. Dereniak E L and Boreman G D 1996 Infrared Detectors and Systems (New York: Wiley)
3. Kruse P W and Skatrud D D 1997 Uncooled infrared imaging arrays and systems Semicond. Semimetals 47 17-44
4. Amantea R, Knoedler C M, Pantuso F P, Patel V K, Sauer D J and Tower J R 1997 An uncooled IR imager with 5 mK NEDT Proc. SPIE 3061 210-22
5. Amantea R, Goodman L A, Pantuso F, Sauer D J, Varghese M, Villani T S and White L K 1998 Progress towards an uncooled IR imager with 5 mK NETD Proc. SPIE 3436 647-59
6. Zhao Y, Mao M, Horowitz R, Majumdar A, Varesi J, Norton P and Kitching J 2002 Optomechanical uncooled infrared imaging system, design, microfabrication, and performance J. Microelectromech. Syst. 11 136-46
7. Datskos P G, Lavrik L and Rajicm S 2004 Performance of uncooled microcantilever thermal detectors Rev. Sci. Instrum. 75 1134-48
8. Zhao Y, Choi J, Horowitz R, Majumdar A, Kitching J and Norton P 2003 Characterization and performance of optomechanical uncooled infrared imaging system Proc. SPIE 4820 164-74
9. Hunter S R, Maurer G, Jiang L and Simelgor G 2006 High-sensitivity uncooled microcantilever infrared imaging arrays Proc. SPIE 6206 62061J
10. Vinci R P and Vlassak J J 1996 Mechanical behavior of thin films Annu. Rev. Mater. Sci. 26 431-62
11. Huang S, Li B and Zhang X 2006 Elimination of stress-induced curvature in microcantilever infrared focal plane arrays Sensors Actuators A 130-131 331-9
12. Bifano T G, Johnson H T, Bierden P and Mali R K 2002 Elimination of stressinduced curvature in thin-film structures J. Microelectromech. Syst. 11 592-7
13. Chu W-H, Mehregany M and Mullen R L 1993 Analysis of tip deflection and force of a bimetallic cantilever microactuator J. Micromech. Microeng. 3 4-7
14. Huang S 2007 Development of double-cantilever infrared detectors PhD Thesis Boston University pp 40-45
15. Zhao Y, Mao M, Horowitz R, Majumdar A, Varesi J, Norton P and Kitching J 2002 Optomechanical uncooled infrared imaging system: design, microfabrication, and performance J. Microelectromech. Syst. 11 136-46
16. Li B 2004 Design and simulation of an uncooled double-cantilever microbolometer with the potential for ∼mK NETD Sensors Actuators A 112 351-9
17. HD Microsystems Inc. 2000 PI2620 Data Sheet
18. Bagolini A, Pakula L, L M Scholtes T, T M Pham H, French P J and Sarro P M 2002 Polyimide sacrificial layer and novel materials for post-processing surface micromachining J. Micromech. Microeng. 12 385-9
19. Williams K R and Richard S M 1996 Etch rates for micromachining processes J. Microelectromech. Syst. 5 256-69
20. Groot P D and Deck L 1995 Surface profiling by analysis of white-light interferograms in the special frequency domain J. Mod. Opt. 42 389-401
21. Zhang Y and Dunn M L 2004 Geometric and material nonlinearity during the deformation of micron-scale thin-film bilayers subject to thermal loading J. Mech. Phys. Solids 52 2101-26
22. Chen K S, Zhang X and Lin S Y 2003 Intrinsic stress generation and relaxation of plasma-enhanced chemical vapor deposited oxide during deposition and subsequent thermal cycling Thin Solid Films 434 190-202
23. Miller D C, Herrmann C F, Maier H J, George S M, Stoldt C R and Gall K 2006 Thermo-mechanical evolution of multilayer thin films: part I. Mechanical behavior of Au/Cr/Si microcantilevers Thin Solid Films 515 3208-23
24. Miller D C, Herrmann C F, Maier H J, George S M, Stoldt C R and Gall K 2006 Thermo-mechanical evolution of multilayer thin films: Part II. Microstructure evolution in Au/Cr/Si microcantilevers Thin Solid Films 515 3224-40
25. Shackelford J F and Alexander W 2001 CRC Materials Science and Engineering Handbook (Boca Raton, FL: CRC Press)
26. Hughey M P and Cook R F 2004 Massive stress changes in plasma-enhanced chemical vapor deposited silicon nitride films on thermal cycling Thin Solid Films 460 7-16
27. Bruce R H 1981 Ion response to plasma excitation frequency J. Appl. Phys. 52 7064-6
28. Volket C A, Alofs C F and Liefting J R 1994 Deformation mechanisms of Al films on oxidized Si wafers J. Mater. Res. 9 1147-55
29. Cao Z and Zhang X 2004 Density change and viscous flow during structural relaxation of plasma-enhanced chemical-vapor-deposited silicon oxide films J. Appl. Phys. 96 4273-80
30. Freund L B, Floro J A and Chason E 1999 Extension of the Stoney formula for substrate curvature to configurations with thin substrate or large deformations Appl. Phys. Lett. 74 1987-9
31. Zhang Y and Dunn M L 2003 Deformation of blanked and patterned bilayer thin-film microstructures during post-release and cyclic thermal loading J. Microelectromech. Syst. 12 788-96
32. Huang S and Zhang X 2007 Study of gradient stress in bimaterial cantilever structures for infrared applications J. Micromech. Microeng. 17 1211-9
33. Cao Z, Zhang T-Y and Zhang X 2005 Microbridge testing of plasma-enhanced chemical vapor deposited silicon oxide films on silicon wafers J. Appl. Phys. 97 104909