Lithographic pattern formation via metastable state rare gas atomic beams

Nanotechnology

Volumn 15, Issue 9, 2004, Pages 1356-1362

  Baker, M ^a   Palmer, A J ^a   MacGillivray, W R ^a,b   Sang, R T ^a  

^a GRIFFITH UNIVERSITY   (Australia)

^b UNIVERSITY OF SOUTHERN QUEENSLAND   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC BEAMS; CATALYSIS; COMPUTER SIMULATION; CONTAMINATION; CROSSLINKING; ELLIPSOMETRY; ETCHING; GONIOMETERS; PHOTOLITHOGRAPHY; SELF ASSEMBLY; X RAY PHOTOELECTRON SPECTROSCOPY;

DODECANETHIOL (DDT); INTERNAL STATES; MAGNETIC FORCES; METASTABLE STATE;

INERT GASES;

EID: 4644257762     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/15/9/041     Document Type: Article

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