Electron-induced crosslinking of aromatic self-assembled monolayers: Negative resists for nanolithography

Applied Physics Letters

Volumn 75, Issue 16, 1999, Pages 2401-2403

  Geyer, W ^a   Stadler, V ^a   Eck, W ^a   Zharnikov, M ^a   Golzhauser A ^a   Grunze, M ^a  

^a UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001211583     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125027     Document Type: Article

References (19)

1. C. R. K. Marrian, F. K. Perkins, S. L. Brandow, T. S. Koloski, E. A. Dobisz, and J. M. Calvert, Appl. Phys. Lett. 64, 390 (1994).
2. H. U. Müller, C. David, B. Völkel, and M. Grunze, J. Vac. Sci. Technol. B 13, 2846 (1995).
3. B. Völkel, A. Gölzhäuser, H. U. Müller, C. David, and M. Grunze, J. Vac. Sci. Technol. B 15, 2877 (1997).
4. C. David, H. U. Müller, B. Völkel, and M. Grunze, Microelectron. Eng. 30, 57 (1996).
5. M. P. Seah and W. A. Dench, Surf. Interface Anal. 1, 2 (1979).
6. A. Ulman, Chem. Rev. 96, 1533 (1996).
7. J. M. Calvert, J. Vac. Sci. Technol. B 11, 2155 (1993).
8. K. K. Berggren, A. Bard, J. L. Wilbur, J. D. Gillaspy, A. G. Helg, J. J. McClelland, S. L. Rolston, W. D. Phillips, M. Prentiss, and G. M. Whitesides, Science 269, 1255 (1995).
9. C. S. Dulcey, J. H. Georger, M. S. Chen, S. W. McElvany, O. F. Ce, V. I. Benezra, and J. M. Calvert, Langmuir 12, 1638 (1996).
10. M. J. Lercel, H. G. Craighead, A. N. Parikh, K. Seshadri, and D. L. Allara, Appl. Phys. Lett. 68, 1505 (1996).
11. There is one example of SAMs containing polymerizable diacetylenic groups that has been used as a negative UV resist: T. Kim, K. C. Chan, and R. M. Crooks, J. Am. Chem. Soc. 119, 189 (1997).
12. M. S. Newman and H. A. Karnes, J. Org. Chem. 31, 3980 (1966).
13. 7/2 peak at 84.0 eV. NEXAFS spectra were recorded in partial yield (-150 V retardation potential) at the HE-TGM2 monochromator of the BESSY 1 electron synchrotron.
14. A. Gölzhäuser, S. Panov, M. Mast, A. Schertel, M. Grunze, and Ch. Wöll, Surf. Sci. 334, 235 (1995).
15. A. Gölzhäuser, S. Panov, and Ch. Wöll, Surf. Sci. 314, L849 (1994).
16. J. Stöhr, NEXAFS Spectroscopy (Springer, Berlin, 1992).
17. C. Olson and P. A. Rowntree, J. Chem. Phys. 10, 3750 (1998).
18. M. Zharnikov, W. Geyer, A. Gölzhäuser, S. Frey, and M. Grunze, Phys. Chem. Chem. Phys. 1, 3163 (1999).
19. D. Lin-Vien, N. B. Colthup, W. G. Fateley, and J. G. Grasselli, The Handbook of Infrared and Roman Characteristic Frequencies of Organic Molecules (Academic, San Diego, 1991).