Nanofabrication using neutral atomic beams

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2093-2100

  Thywissen, J H ^a   Johnson, K S ^a   Younkin, R ^a   Dekker, N H ^a   Berggren, K K ^a,c   Chu, A P ^a,d   Prentiss, M ^a   Lee, S A ^b  

^a HARVARD UNIVERSITY   (United States)

^b Department of Environmental and Radiological Health Sciences   (United States)

^c MIT LINCOLN LABORATORY   (United States)

^d LEHMAN BROTHERS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000691873     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589227     Document Type: Article

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