Micromotion analysis by deep-UV speckle interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5145, Issue , 2003, Pages 17-22

  Aswendt, Petra ^a  

^a FRAUNHOFER INSTITUTE FOR MACHINE TOOLS AND FORMING TECHNOLOGY IWU   (Germany)

Author keywords

Deep ultraviolet laser; MEMS; Microsystems; Speckle interferometry

Indexed keywords

INTERFEROMETERS; INTERFEROMETRY; LASER APPLICATIONS; QUALITY ASSURANCE; SPECKLE; ULTRAVIOLET RADIATION;

MICROSPECKLE INTERFEROMETER; MICROSYSTEMS; MOTION ANALYSIS; SPECKLE INTERFEROMETRY;

MICROELECTROMECHANICAL DEVICES;

EID: 1342309715     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.501638     Document Type: Conference Paper

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