SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of the Korean Physical Society

Volumn 45, Issue 2, 2004, Pages 404-408

Use of a neural network to characterize the surface roughness of a SiC film

(8) Kim, Byungwhan a Kim, Sungmo a Lee, Soo Hong a Hong, Wan Shick a Lee, Byung Teak b Kim, Dong Won c Shim, Il Joo c Choi, Seongjin c

a Sejong University (South Korea)

b Chonnam National University (South Korea)

c Korea University (South Korea)

Author keywords

Neural network; Plasma etching; Silicon carbide

Indexed keywords

EID: 4544275254 PISSN: 03744884 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (4)

References (25)

1
- 0029197075
- P. H. Yih and A. J. Steckl, J. Electrochem. Soc. 142, 312 (1995).
- (1995) J. Electrochem. Soc. , vol.142 , pp. 312
- Yih, P.H.¹ Steckl, A.J.²

2
- 0030105132
- R. Wolf and R. Helbig, J. Electrochem. Soc. 143, 1037 (1996).
- (1996) J. Electrochem. Soc. , vol.143 , pp. 1037
- Wolf, R.¹ Helbig, R.²

3
- 0001320376
- M. Kothandaraman, D. Alok and B. J. Baliga, J. Elect. Mat. 25, 875 (1996).
- (1996) J. Elect. Mat. , vol.25 , pp. 875
- Kothandaraman, M.¹ Alok, D.² Baliga, B.J.³

4
- 0032329867
- J. J. Wang, E. S. Lambers, S. J. Pearton, M. Ostling, C. M. Zetterling, J. M. Grow, F. Ren and R. J. Shul, J. Vac. Sci. Technol. A 16, 2204 (1998).
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 2204
- Wang, J.J.¹ Lambers, E.S.² Pearton, S.J.³ Ostling, M.⁴ Zetterling, C.M.⁵ Grow, J.M.⁶ Ren, F.⁷ Shul, R.J.⁸

5
- 0000725696
- A. Khan and I. Adesida, Appl. Phys. Lett. 75, 2268 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 2268
- Khan, A.¹ Adesida, I.²

6
- 0032188310
- L. Cao, B. Li and J. H. Zhao, J. Electrochem. Soc. 145, 3609 (1998).
- (1998) J. Electrochem. Soc. , vol.145 , pp. 3609
- Cao, L.¹ Li, B.² Zhao, J.H.³

7
- 51649145604
- J. A. Powell, D. J. Larkin and P. B. Abel, J. Electron Mater. 24, 295 (1995).
- (1995) J. Electron Mater. , vol.24 , pp. 295
- Powell, J.A.¹ Larkin, D.J.² Abel, P.B.³

8
- 0031170485
- L. Ahou, V. Audurier, P. Pirouz and J. A. Powell, J. Electrochem. Soc. 144, L161 (1997).
- (1997) J. Electrochem. Soc. , vol.144
- Ahou, L.¹ Audurier, V.² Pirouz, P.³ Powell, J.A.⁴

9
- 4243802480
- S. Scharnholz, E. Stein von Kamienski, A. Golz, C. Leonhard and H. Kurz, Mater. Sci. Forum 264-268, 1001 (1998).
- (1998) Mater. Sci. Forum , vol.264-268 , pp. 1001
- Scharnholz, S.¹ Stein Von Kamienski, E.² Golz, A.³ Leonhard, C.⁴ Kurz, H.⁵

10
- 0032046150
- J. B. Casady, S. S. Mani, R. R. Siergiej, W. Urban, V. Balakrishna, R. A. Sanger and C. D. Brandt, J. Electrochem. Soc. 145, L58 (1998).
- (1998) J. Electrochem. Soc. , vol.145
- Casady, J.B.¹ Mani, S.S.² Siergiej, R.R.³ Urban, W.⁴ Balakrishna, V.⁵ Sanger, R.A.⁶ Brandt, C.D.⁷

11
- 0036495811
- B. Kim, H. J. Choi and B. T. Lee, J. Vac. Sci. Technol. A 20, 424 (2002).
- (2002) J. Vac. Sci. Technol. A , vol.20 , pp. 424
- Kim, B.¹ Choi, H.J.² Lee, B.T.³

12
- 0037804792
- B. Kim, K. Kim and B. T. Lee, Appl. Surf. Sci. 217, 261 (2003).
- (2003) Appl. Surf. Sci. , vol.217 , pp. 261
- Kim, B.¹ Kim, K.² Lee, B.T.³

13
- 0030212637
- J. R. Flemish and K. Xie, J. Electrochem. Soc. 143, 2620 (1996).
- (1996) J. Electrochem. Soc. , vol.143 , pp. 2620
- Flemish, J.R.¹ Xie, K.²

14
- 0035897276
- B. Kim and S. Park, Chemom. Intell. Lab. Syst. 56, 39 (2001).
- (2001) Chemom. Intell. Lab. Syst. , vol.56 , pp. 39
- Kim, B.¹ Park, S.²

15
- 0036164586
- B. Kim, S. M. Kong and B. T. Lee, J. Vac. Sci. Technol. A 20, 146 (2002).
- (2002) J. Vac. Sci. Technol. A , vol.20 , pp. 146
- Kim, B.¹ Kong, S.M.² Lee, B.T.³

16
- 0037248690
- B. Kim and K. Kwon, J. Appl. Phys. 93, 76 (2003).
- (2003) J. Appl. Phys. , vol.93 , pp. 76
- Kim, B.¹ Kwon, K.²

17
- 0037804128
- B. Kim, S. S. Han, T. S. Kim, B. S. Kim and I. J. Shim, IEEE Trans. Plasma Sci. 31, 317 (2003).
- (2003) IEEE Trans. Plasma Sci. , vol.31 , pp. 317
- Kim, B.¹ Han, S.S.² Kim, T.S.³ Kim, B.S.⁴ Shim, I.J.⁵

18
- 0036026392
- B. Kim, K. H. Kwon, S. K. Kwon, J. M. Park, S. W. Yoo, K. S. Park and B. W. Kim, J. Vac. Sci. Technol. B 20, 2113 (2002).
- (2002) J. Vac. Sci. Technol. B , vol.20 , pp. 2113
- Kim, B.¹ Kwon, K.H.² Kwon, S.K.³ Park, J.M.⁴ Yoo, S.W.⁵ Park, K.S.⁶ Kim, B.W.⁷

19
- 0344551786
- H. S. Lee, B. Kim, S. R. Choi, W. Hong, K. K. Lee, W. S. Choi and M. T. Lim, J. Korean Phys. Soc. 43, 817 (2003).
- (2003) J. Korean Phys. Soc. , vol.43 , pp. 817
- Lee, H.S.¹ Kim, B.² Choi, S.R.³ Hong, W.⁴ Lee, K.K.⁵ Choi, W.S.⁶ Lim, M.T.⁷

20
- 0035981409
- B. Kim, K. H. Kwon, S. K. Kwon, J. M. Park, S. W. Yoo, K. S. Park, I. K. You and B. W. Kim, J. Korean Phys. Soc. 41, 433 (2002).
- (2002) J. Korean Phys. Soc. , vol.41 , pp. 433
- Kim, B.¹ Kwon, K.H.² Kwon, S.K.³ Park, J.M.⁴ Yoo, S.W.⁵ Park, K.S.⁶ You, I.K.⁷ Kim, B.W.⁸

21
- 0003486756
- Wiley, Singapore
- D. C. Montgomery, Design and Analysis of Experiments (Wiley, Singapore, 1991).
- (1991) Design and Analysis of Experiments
- Montgomery, D.C.¹

22
- 0003444646
- M.I.T. Press, Cambridge
- D. E. Rummelhart and J. L. McClelland, Parallel Distributed Processing (M.I.T. Press, Cambridge, 1986).
- (1986) Parallel Distributed Processing
- Rummelhart, D.E.¹ McClelland, J.L.²

23
- 0003722376
- Addison Wesley, Reading
- D. E. Goldbeg, Genetic Algorithms in Search, Optimization & Machine Learning (Addison Wesley, Reading, 1989).
- (1989) Genetic Algorithms in Search, Optimization & Machine Learning
- Goldbeg, D.E.¹

24
- 0043110228
- S. Samukawa, Appl. Phys. Lett. 68, 316 (1996).
- (1996) Appl. Phys. Lett. , vol.68 , pp. 316
- Samukawa, S.¹

25
- 0038243104
- B. Kim, S. Kim, S. C. Ahn and B. T. Lee, Thin Solid Films 434, 276 (2003).
- (2003) Thin Solid Films , vol.434 , pp. 276
- Kim, B.¹ Kim, S.² Ahn, S.C.³ Lee, B.T.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.