Plastic micro-optical components with the LIGA technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4984, Issue , 2003, Pages 29-37

  Singleton, Laurence ^a   Detemple, Peter ^a   Frese, Ines ^a   Klotzbücher, Thomas ^a   Bauer, Hans Dieter ^a,b  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

^b UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

Deep X ray Lithography; DXRL; LIGA; Moulding; Optical Components; PMMA; Waveguides

Indexed keywords

BIOMEDICAL EQUIPMENT; ELECTROPLATING; NETWORKS (CIRCUITS); OPTICAL WAVEGUIDES; PLASTICS MOLDING; PRODUCT DESIGN; ROUGHNESS MEASUREMENT; TELECOMMUNICATION EQUIPMENT; ULTRAVIOLET RADIATION; X RAY LITHOGRAPHY;

SIDEWALL ROUGHNESS; ULTRAVIOLET LITHOGRAPHY;

MICROOPTICS;

EID: 0038057792     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.499993     Document Type: Conference Paper

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