Fabrication of microchannel using planar photolithography

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5718, Issue , 2005, Pages 73-81

  Yao, Peng ^a   Schneider, Garrett J ^a   Prather, Dennis W ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROCHANNEL; MICROFLUIDICS; PLANAR PHOTOLITHOGRAPHY; SIDEWALL PATTERNS;

BONDING; COATINGS; DEFECTS; FABRICATION; MICROMACHINING; PHOTOLITHOGRAPHY; PHOTONS; POLYMERIZATION;

FLUIDICS;

EID: 21844480091     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.590956     Document Type: Conference Paper

References (9)

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