-
2
-
-
2942547450
-
Micro total analysis systems. Recent developments
-
T. Vilkner D. Janasek A. Manz Micro total analysis systems. Recent developments Anal. Chem. 2004 76 3373 3385
-
(2004)
Anal. Chem.
, vol.76
, pp. 3373-3385
-
-
Vilkner, T.1
Janasek, D.2
Manz, A.3
-
3
-
-
1642452594
-
Hard and soft micromachining for BioMEMS: Review of techniques and examples of applications in microfluidics and drug delivery
-
Babak Ziaie Antonio Baldi Ming Lei Yuandong Gu Ronald A. Siegel Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in microfluidics and drug delivery Adv. Drug Delivery Rev. 2004 56 145 172
-
(2004)
Adv. Drug Delivery Rev.
, vol.56
, pp. 145-172
-
-
Babak, Z.1
Antonio, B.2
Ming, L.3
Yuandong, G.4
Siegel Ronald, A.5
-
4
-
-
0037902179
-
Microfluidic devices for cellomics: A review
-
Helene Andersson Albert van den Berg Microfluidic devices for cellomics: a review Sens. Actuators, B 2003 92 315 325
-
(2003)
Sens. Actuators, B
, vol.92
, pp. 315-325
-
-
Helene, A.1
Den Berg Albert, V.2
-
6
-
-
0034711410
-
From Micro- to Nanofabrication with Soft Materials
-
Stephen R. Quake Axel Scherer From Micro- to Nanofabrication with Soft Materials Science 2000 290 1536 1540
-
(2000)
Science
, vol.290
, pp. 1536-1540
-
-
Quake Stephen, R.1
Axel, S.2
-
7
-
-
0038539369
-
Creating sub-surface channels in PMMA with ion beam lithography in only one step
-
Yvan Gonin Frans Munnik Frédéric Benninger Sergueï Mikhailov Creating sub-surface channels in PMMA with ion beam lithography in only one step Appl. Surf. Sci. 2003 217 289 293
-
(2003)
Appl. Surf. Sci.
, vol.217
, pp. 289-293
-
-
Yvan, G.1
Frans, M.2
Frédéric, B.3
Sergueï, M.4
-
8
-
-
0037438784
-
A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists
-
Yun-Ju Chuang Fan-Gang Tseng Jen-Hau Cheng Wei-Keng Lin A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists Sens. Actuators, A 2003 103 64 69
-
(2003)
Sens. Actuators, a
, vol.103
, pp. 64-69
-
-
Yun-Ju, C.1
Fan-Gang, T.2
Jen-Hau, C.3
Wei-Keng, L.4
-
9
-
-
9644304512
-
Building embedded microchannels using a single layered SU-8 and determining Young's modulus using a laser acoustic technique
-
Hui Yu Oluwasey Balogun Biao Li Todd W. Murray Xin Zhang Building embedded microchannels using a single layered SU-8 and determining Young's modulus using a laser acoustic technique J. Micromech. Microeng. 2004 14 1576 1584
-
(2004)
J. Micromech. Microeng.
, vol.14
, pp. 1576-1584
-
-
Hui, Y.1
Oluwasey, B.2
Biao, L.3
Murray Todd, W.4
Xin, Z.5
-
11
-
-
0000296072
-
Electron beam lithography
-
SPIE Press, Bellingham, Washington, USA
-
M. A. McCord and R. J. Michael, Electron beam lithography, Handbook of Microlithography, Micromachining and Microfabrication, vol. 1. SPIE Press, Bellingham, Washington, USA, 1997 Available online: http://www.cnf.cornell.edu/ cnf_spietoc.html
-
(1997)
Handbook of Microlithography, Micromachining and Microfabrication, Vol. 1.
-
-
McCord, M.A.1
Michael, R.J.2
-
12
-
-
0011086113
-
Penetration and energy-loss theory of electrons in solid targets
-
K. Kanaya S. Okayama Penetration and energy-loss theory of electrons in solid targets J. Phys. D: Appl. Phys. 1971 5 43 58
-
(1971)
J. Phys. D: Appl. Phys.
, vol.5
, pp. 43-58
-
-
Kanaya, K.1
Okayama, S.2
-
14
-
-
21844467915
-
-
™ SU-8 2000, Available online: http://www.microchem.com/products/su_eight.htm
-
™ SU-8 2000
-
-
Microchem1
-
15
-
-
84893985667
-
SU-8 - A high performance material for MEMS applications
-
R. Ruhmann, K. Pfeiffer, M. Falenski, F. Reuther, R. Engelke and G. Grützner, SU-8 - a high performance material for MEMS applications, Polymers in MEMS, available online: http://www.microchem.com/resources/ app_notes.htm
-
Polymers in MEMS
-
-
Ruhmann, R.1
Pfeiffer, K.2
Falenski, M.3
Reuther, F.4
Engelke, R.5
Grützner, G.6
-
16
-
-
0942300907
-
Polymer embossing tools for rapid prototyping of plastic microfluidic devices
-
Jagannathan Narasimhan Ian Papautsky Polymer embossing tools for rapid prototyping of plastic microfluidic devices J. Micromech. Microeng. 2004 14 96 103
-
(2004)
J. Micromech. Microeng.
, vol.14
, pp. 96-103
-
-
Jagannathan, N.1
Ian, P.2
-
17
-
-
10844258258
-
Rendering SU-8 hydrophilic to facilitate use in micro channel fabrication
-
Maria Nordstrom Rodolphe Marie Montserrat Calleja Anja Boisen Rendering SU-8 hydrophilic to facilitate use in micro channel fabrication J. Micromech. Microeng. 2004 14 1614 1617
-
(2004)
J. Micromech. Microeng.
, vol.14
, pp. 1614-1617
-
-
Maria, N.1
Rodolphe, M.2
Montserrat, C.3
Anja, B.4
-
18
-
-
85022123467
-
SU-8 hydrophilic modification by forming copolymer with hydrophilic epoxy molecule
-
Squaw Valley, California USA
-
Chun-Lung Wu, Ming-Hung Chen and Fan-Gang Tseng, SU-8 hydrophilic modification by forming copolymer with hydrophilic epoxy molecule, 7th lnternational Conference on Miniaturized Chemical and Biochemical Analysts Systems, 2003, October 5-9, Squaw Valley, California USA
-
(2003)
7th Lnternational Conference on Miniaturized Chemical and Biochemical Analysts Systems
-
-
Chun-Lung, W.1
Ming-Hung, C.2
Fan-Gang, T.3
-
19
-
-
0026688439
-
DNA electrophoresis in microlithographic arrays
-
W. D. Volkmuth R. H. Austin DNA electrophoresis in microlithographic arrays Nature 1992 358 600 602
-
(1992)
Nature
, vol.358
, pp. 600-602
-
-
Volkmuth, W.D.1
Austin, R.H.2
-
21
-
-
10644258136
-
Macro-to-micro interface for microfluidic devices
-
Carl K. Fredrickson Z. Hugh Fan Macro-to-micro interface for microfluidic devices Lab Chip 2004 4 526 533
-
(2004)
Lab Chip
, vol.4
, pp. 526-533
-
-
Fredrickson Carl, K.1
Hugh, F.Z.2
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