Interconnected multi-level microfluidic channels fabricated using low temperature bonding of SU-8 and multilayer lithography

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5718, Issue , 2005, Pages 209-215

  Peng, Z C ^a   Ling, Z G ^a   Goettert, J ^a   Hormes, J ^a   Lian, K ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MULTILAYERS; PHOTOLITHOGRAPHY; SENSORS; SILICON;

BONDING EQUIPMENT; MICROFLUIDIC SYSTEMS; MULTILAYER LITHOGRAPHY; TOTAL ANALYSIS SYSTEMS (TAS);

FLUID DYNAMICS;

EID: 21844452688     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.592244     Document Type: Conference Paper

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