Bulge formation and improvement of the polymer in CO2 laser micromachining

Journal of Micromechanics and Microengineering

Volumn 15, Issue 10, 2005, Pages 1878-1884

  Chung, C K ^a   Lin, Y C ^a   Huang, G R ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

LASERS; MICROPROCESSOR CHIPS; PHOTORESISTS; POLYMETHYL METHACRYLATES; RAPID PROTOTYPING; ULTRAVIOLET RADIATION;

LASER MICROMACHINING; MICROFLUIDIC CHIPS; PHOTORESIST LAYER; PHOTOTHERMAL MELTING;

MICROMACHINING;

EID: 24644439550     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/10/013     Document Type: Article

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