Femtosecond laser three-dimensional microstructuring inside photosensitive glasses

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5578, Issue PART 2, 2004, Pages 677-686

  Fisette, B ^a   Meunier, M ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

3d microfabrication; Femtosecond laser; Microchannel; Photosensitive glass

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; HYDROFLUORIC ACID; INFRARED RADIATION; LASER BEAMS; MICROSTRUCTURE; PHOTOSENSITIVE GLASS; SOLID STATE LASERS; THREE DIMENSIONAL; ULTRAVIOLET RADIATION; WATER;

FEMTOSECOND LASER; LASER PARAMETERS; MICROCHANNELS; MICROFLUIDICS; THREE-DIMENSIONAL (3D) MICROFABRICATION;

LASER PULSES;

EID: 21944441106     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.567244     Document Type: Conference Paper

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