Rapid processing of replication tools with high-aspect-ratio microchannels for microfluidics

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5718, Issue , 2005, Pages 65-72

  Jurischka, R ^a,b   Blattert, Ch ^a   Tahhan, I ^a   Muller C ^a   Schoth, A ^a   Menz, W ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b Institute of Microsystems   (Germany)

Author keywords

Electroplating; Hot embossing; Injection molding; Microchannel; Microfluidics; Polymer; Rapid processing; Replication; SU 8; UV LIGA

Indexed keywords

COPOLYMERS; ELECTROPLATING; HARDNESS; INJECTION MOLDING; POLYCARBONATES; SURFACE PROPERTIES; ULTRAVIOLET RADIATION;

HOT EMBOSSING; MICROCHANNEL; MICROFLUIDICS; RAPID PROCESSING POLYMER; REPLICATION; SU-8; UV-LIGA;

FLUIDICS;

EID: 21844478096     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.590549     Document Type: Conference Paper

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