Rapid fabrication of hot embossing tools using PDMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4982, Issue , 2003, Pages 110-119

  Narasimhan, Jagannathan ^a   Papautsky, Ian ^a  

^a 705 Engineering Research Center   (United States)

Author keywords

Casting; Embossing tools; Hot embossing; PDMS; PMMA

Indexed keywords

CASTING; FLUIDIC DEVICES; PHOTORESISTS; POLYMETHYL METHACRYLATES; SILICON;

HOT EMBOSSING;

MICROELECTROMECHANICAL DEVICES;

EID: 0038735711     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472737     Document Type: Conference Paper

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