Modeling electrostatic force microscopy for conductive and dielectric samples using the boundary element method

Engineering Analysis with Boundary Elements

Volumn 32, Issue 8, 2008, Pages 682-691

  Shen, Y ^a   Barnett, D M ^a   Pinsky, P M ^a  

^a Stanford University   (United States)

Author keywords

Atomic force microscopy; Boundary element method; Electrostatic force microscopy; Image charge method; Implicit differentiation method; Maxwell stress tensor

Indexed keywords

ATOMIC FORCE MICROSCOPY; BOUNDARY ELEMENT METHOD; COULOMB INTERACTIONS; SURFACE TOPOGRAPHY; TENSORS;

ELECTROSTATIC FORCE MICROSCOPY; IMAGE CHARGE METHOD; IMPLICIT DIFFERENTIATION METHOD; MAXWELL STRESS TENSORS;

ELECTROSTATIC FORCE;

EID: 44949086663     PISSN: 09557997     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.enganabound.2007.12.003     Document Type: Article

References (36)

1. Binnig G., Quate C.F., and Gerber Ch. Atomic force microscope. Phys Rev Lett 56 (1986) 930-933
2. Stern J.E., Terris B.D., Mamin H.J., and Rugar D. Deposition and imaging of localized charge on insulator surfaces using a force microscope. Appl Phys Lett 53 26 (1988) 2717-2719
3. Nonnenmacher M., O'Boyle M.P., and Wickramasinghe H.K. Kelvin probe force microscopy. Appl Phys Lett 58 25 (1991) 2921-2923
4. Williams C.C., Hough W.P., and Rishton S.A. Scanning capacitance microscopy on a 25 nm scale. Appl Phys Lett 55 2 (1989) 203-205
5. Girard P. Electrostatic force microscopy: principles and some applications to semiconductors. Nanotechnology 12 (2001) 485-490
6. Hu J., Xiao X.D., Ogletree D.F., and Salmerón M. Imaging the condensation and evaporation of molecularly thin films of water with nanometer resolution. Science 268 (1995) 267-269
7. Hao H.W., Baró A.M., and Sáenz J.J. Electrostatic and contact forces in force microscopy. J Vac Sci Technol B 9 (1991) 1323-1328
8. Terris B.D., Stern J.E., Rugar D., and Mamin H.J. Contact electrification using force microscopy. Phys Rev Lett 63 (1989) 2669-2672
9. Pan L.H., Sullivan T.E., Peridier V.J., Cutler P.H., and Miskovsky N.M. Three-dimensional electrostatic potential, and potential-energy barrier, near a tip-base junction. Appl Phys Lett 65 (1994) 2151-2153
10. Hochwitz T., Henning A.K., Levey C., Daghlian C., and Slinkman J. Capacitive effects on quantitative dopant profiling with scanned electrostatic force microscopes. J Vac Sci Technol B 14 (1996) 457-462
11. Hudlet S., Saint Jean M., Guthmann C., and Berger J. Evaluation of the capacitive force between an atomic force microscopy tip and a metallic surface. Eur Phys J B 2 (1998) 5-10
12. Colchero J., Gil A., and Baró A.M. Resolution enhancement and improved data interpretation in electrostatic force microscopy. Phys Rev B 64 (2001) 245403
13. Livshits A.I., Shluger A.L., Rohl A.L., and Foster A.S. Model of noncontact scanning force microscopy on ionic surfaces. Phys Rev B 59 (1999) 2436-2448
14. 2(111): experiment and theory. J Phys Condens Matter 13 (2001) 2061-2079
15. Mesa G., Dobado-Fuentes E., and Sáenz J.J. Image charge method for electrostatic calculations in field-emission diodes. J Appl Phys 79 (1996) 39-44
16. Belaidi S., Girard P., and Leveque G. Electrostatic forces acting on the tip in atomic force microscopy: modelization and comparison with analytic expressions. J Appl Phys 81 (1997) 1023-1030
17. Gómez-Moñivas S., and Sáenz J.J. Theory of electrostatic probe microscopy: a simple perturbative approach. Appl Phys Lett 76 (2000) 2955-2957
18. Gómez-Moñivas S., Froufe-Pérez L., Caamaño A.J., and Sáenz J.J. Electrostatic force between sharp tips and metallic and dielectric samples. Appl Phys Lett 79 (2001) 4048-4050
19. Sacha G.M., Gómez-Navarro C., Sáenz J.J., and Gómez-Herrero J. Quantitative theory for the imaging of conducting objects in electrostatic force microscopy. Appl Phys Lett 89 (2006) 173122
20. Belaidi S., Lebon E., Girard P., Leveque G., and Pagano S. Finite element simulations of the resolution in electrostatic force microscopy. Appl Phys A 66 (1998) S239-S243
21. Li Z.-Y., Gu B.-Y., and Yang G.-Z. Scanning-electrostatic-force microscopy: self-consistent method for mesoscopic surface structures. Phys Rev B 57 (1998) 9225-9233
22. Jacobs H.O., Leuchtmann P., Homan O.J., and Stemmer A. Resolution and contrast in Kelvin probe force microscopy. J Appl Phys 84 (1998) 1168-1173
23. Strassburg E., Boag A., and Rosenwaks Y. Reconstruction of electrostatic force microscopy images. Rev Sci Instrum 76 (2005) 083705
24. Martin Y., Willams C.C., and Wickramasinghe H.K. Atomic force microscope-force mapping and profiling on a sub 100-Å scale. J Appl Phys 61 10 (1987) 4723-4729
25. Butt H.J., and Jaschke M. Calculation of thermal noise in atomic force microscopy. Nanotechnology 6 (1995) 1-7
26. Stark R.W., and Heckl W.M. Fourier transformed atomic force microscopy: tapping mode atomic force microscopy beyond the Hookian approximation. Surf Sci 457 (2000) 219-228
27. Chen J., Workman R.K., Sarid D., and Höper R. Numerical simulations of a scanning force microscope with a large-amplitude vibrating cantilever. Nanotechnology 5 (1994) 199-204
28. Sarid D., Ruskell T.G., Workman R.K., and Chen D. Driven nonlinear atomic force microscopy cantilevers: from noncontact to tapping modes of operation. J Vac Sci Technol B 14 (1996) 864-867
29. Anczykowski B., Krüger D., Babcock K.L., and Fuchs H. Basic properties of dynamic force spectroscopy with the scanning force microscope in experiment and simulation. Ultramicroscopy 66 (1996) 251-259
30. Winkler R.G., Spatz J.P., Sheiko S., Möller M., Reineker P., and Marti O. Imaging material properties by resonant tapping-force microscopy: a model investigation. Phys Rev B 54 12 (1996) 8908-8912
31. García R., and San Paulo A. Attractive and repulsive tip-sample interaction regimes in tapping-mode atomic force microscopy. Phys Rev B 60 7 (1999) 4961-4967
32. Wang L. The role of damping in phase imaging in tapping mode atomic force microscopy. Surf Sci 429 (1999) 178-185
33. Jackson J.D. Classical electrodynamics. 3rd ed. (1998), Wiley, New York
34. Smythe W.R. Static and dynamic electricity. 3rd ed. (1968), McGraw-Hill, New York
35. Beer G. Programming the boundary element method: an introduction for engineers (2001), Wiley, Chichester
36. Aoki M., Chiang Y.M., Kosacki I., Lee I.J.R., Tuller H., and Liu Y.P. Solute segregation and grain-boundary impedance in high-purity stabilized zirconia. J Am Ceram Soc 79 5 (1996) 1169-1180