Finite element simulations of the resolution in electrostatic force microscopy

Applied Physics A: Materials Science and Processing

Volumn 66, Issue SUPPL. 1, 1998, Pages

  Belaidi, S ^a   Lebon, F ^b   Girard, P ^a   Leveque, G ^a   Pagano, S ^b  

^a CNRS   (France)

^b UNIVERSITÉ MONTPELLIER 2   (France)

Author keywords

[No Author keywords available]

Indexed keywords

A-PLANE; ATOMIC FORCE MICROSCOPES; ELECTROSTATIC FORCE MICROSCOPY; EQUIVALENT CHARGES; FINITE ELEMENT SIMULATIONS; METALLIC SAMPLES; POTENTIAL STEPS; SIMULATION RESULT; SPATIAL RESOLUTION; TIP APEX; TIP-SAMPLE DISTANCE;

ATOMIC FORCE MICROSCOPY; ELECTRIC FORCE MICROSCOPY; ELECTROSTATIC DEVICES; SENSORS;

ELECTROSTATIC FORCE;

EID: 0005785561     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s003390051138     Document Type: Article

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