Capacitive effects on quantitative dopant profiling with scanned electrostatic force microscopes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 457-462

  Hochwitz, Todd ^a   Henning, Albert K ^a   Levey, Chris ^a   Daghlian, Charles ^a   Slinkman, James ^b  

^a DARTMOUTH COLLEGE   (United States)

^b IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001402033     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588494     Document Type: Article

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