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Volumn 16, Issue 18, 2004, Pages 3518-3523

Position-specified formation of epitaxial Si grains on thermally oxidized Si(001) surfaces via isolated nanodots

Author keywords

[No Author keywords available]

Indexed keywords

NANODOTS; THERMAL OXIDE LAYERS;

EID: 4444291635     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm049492v     Document Type: Article
Times cited : (3)

References (36)
  • 4
    • 4444313447 scopus 로고    scopus 로고
    • http://www.cnf.cornell.edu/ebeam/resist.html.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.