Self-limiting and pattern dependent oxidation of silicon dots fabricated on silicon-on-insulator material

Journal of Applied Physics

Volumn 87, Issue 9 I, 2000, Pages 4580-4585

  Heidemeyer, H ^a   Single, C ^a   Zhou, F ^a   Prins, F E ^a   Kern, D P ^a   Plies, E ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000605624     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373105     Document Type: Article

References (13)

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