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Volumn 255, Issue 3-4, 2003, Pages 250-257

Influence of carrier and doping gases on silicon quantum dots nucleation

Author keywords

A1. Nucleation; A3. Chemical vapor deposition processes; B1. Nanomaterials

Indexed keywords

CHEMICAL VAPOR DEPOSITION; NANOSTRUCTURED MATERIALS; NUCLEATION; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING;

DOPING GASES;

SEMICONDUCTOR QUANTUM DOTS;

EID: 0038200692 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(03)01261-2 Document Type: Article

Times cited : (4)

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